“For the research and development of cutting-edge semiconductor technologies, the expertise and technological experience of industry partners like ZEISS is essential. Therefore, we are very pleased to strengthen our partnership even further,” says Luc Van den hove, CEO of imec.
With the signed agreement, the two cooperation partners reaffirm their joint efforts to advance key semiconductor manufacturing technologies such as High-NA-EUV lithography.
As part of the agreement, Zeiss supports imec not only by participating in research projects to advance manufacturing, process, and measurement technologies for semiconductor manufacturing but also by providing lithography optics, integrated into the lithography scanner systems of the strategic partner ASML
Imec’s pilot line, now being expanded with the NanoIC pilot line, operated in Leuven, Belgium, encompasses the entire value creation process as well as various technology strands for semiconductor manufacturing. It aims to provide industry representatives such as end customers, suppliers, and research institutions access to pioneering and advanced semiconductor technologies and platforms, enabling them to explore, develop, and test innovations.
The collaboration is deepened through Zeiss’ involvement in various industry partner programs, such as Advanced Patterning, 3D System Integration, and Optical Interconnect, under the leadership of imec. In these programs, work is being done together on the latest process and inspection methods for process optimizations of next-generation semiconductors.
The strengthened cooperation between the two partners also sends a signal regarding the relevance of cross-industry networking for the global semiconductor market: “This strategic partnership between imec and Zeiss underscores how strong cohesion among European partners, which is crucial in setting up the NanoIC pilot line, the most advanced infrastructure for sub-2nm research and development in the world, accelerates innovation and strengthens Europe’s leadership position in the semiconductor ecosystem,” says Van den hove..